STUDY ON BE AND SI DOPING OF CUBIC BORON NITRIDE FILMS

Computer Engineering electronics Engineering Civil Engineering

This work presents the recent progress in research of synthesis and doping of cubic boron nitride (cBN) films, prepared by chemical and physical vapor deposition (CVD and PVD) methods. Cubic boron nitride (cBN) is a synthetic material which does not exist in nature. This compound material was sythesized in 1950-s using a high-pressure high-temperature (HPHT) [...] loading..